Characterization of showerhead performance at low pressure

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2000 Vol. 18; Iss. 6

Characterization of showerhead performance at low pressure

Hash, D. B., Mihopoulos, T., Govindan, T. R., Meyyappan, M.
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Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1322048
File:
PDF, 308 KB
english, 2000
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