Intercomparison of lateral scales of scanning electron...

Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe

Seppä, Jeremias, Korpelainen, Virpi, Bergstrand, Sten, Karlsson, Helge, Lillepea, Lauri, Lassila, Antti
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Volume:
25
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/25/4/044013
Date:
April, 2014
File:
PDF, 683 KB
english, 2014
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