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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Comparison of two seal technologies for hydraulic microactuators
De Volder, M., Peirs, J., Reynaerts, D., Coosemans, J., Puers, R., Smal, O., Raucent, B.Volume:
1
Year:
2005
Language:
english
DOI:
10.1109/SENSOR.2005.1496424
File:
PDF, 645 KB
english, 2005