![](/img/cover-not-exists.png)
Temperature-Dependent Viscoelasticity in Thin Au Films and Consequences for MEMS Devices
McLean, Mark, Brown, Walter L., Vinci, Richard P.Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2010.2076787
Date:
December, 2010
File:
PDF, 805 KB
english, 2010