An Electrothermal Actuator With Two Degrees of Freedom...

IEEE Transactions on Industrial Electronics 2014 / 10 Vol. 61; Iss. 10

An Electrothermal Actuator With Two Degrees of Freedom Serving as the Arm of a MEMS Gripper

Dian-Sheng Chen,, Po-Fan Yeh,, Yu-fan Chen,, Chun-Wei Tsai,, Chun-Yi Yin,, Ren-Jie Lai,, Jui-che Tsai,
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Volume:
61
Language:
english
Journal:
IEEE Transactions on Industrial Electronics
DOI:
10.1109/TIE.2013.2293693
Date:
October, 2014
File:
PDF, 1.07 MB
english, 2014
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