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5-methyl-1H-benzotriazole as potential corrosion inhibitor for electrochemical-mechanical planarization of copper
BIAN, Yan-fei, ZHAI, Wen-jie, ZHU, Bao-quanVolume:
23
Language:
english
Journal:
Transactions of Nonferrous Metals Society of China
DOI:
10.1016/S1003-6326(13)62751-X
Date:
August, 2013
File:
PDF, 2.94 MB
english, 2013