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Studies of Organometallic Precursors to Aluminum Nitride
Interrante, Leonard V., Carpenter, Leslie E., Whitmarsh, Christopher, Lee, Wei, Garbauskas, Mary, Slack, Glen A.Volume:
73
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-73-359
Date:
January, 1986
File:
PDF, 882 KB
english, 1986