Uniformity of AlGaN∕GaN HEMTs Grown by Ammonia-MBE on 2-in....

Journal of The Electrochemical Society 2005 Vol. 152; Iss. 8

Uniformity of AlGaN∕GaN HEMTs Grown by Ammonia-MBE on 2-in. Sapphire Substrate

Hsu, E. M., Bardwell, J. A., Haffouz, S., Tang, H., Storey, C., Chyurlia, P.
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Volume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1940808
File:
PDF, 96 KB
english, 2005
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