CrNx films prepared using feedback-controlled high power...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2014 / 03 Vol. 32; Iss. 2

CrNx films prepared using feedback-controlled high power impulse magnetron sputter deposition

Wu, Wan-Yu, Hsiao, Bo-Hung, Chen, Pin-Hung, Chen, Wei-Chih, Ho, Chun-Ta, Chang, Chi-Lung
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4862147
Date:
March, 2014
File:
PDF, 2.44 MB
english, 2014
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