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Influence of microwave driver coupling design on plasma density at Testbench for Ion sources Plasma Studies, a 2.45 GHz Electron Cyclotron Resonance Plasma Reactor
Megía-Macías, A., Cortázar, O. D., Vizcaíno-de-Julián, A.Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4869343
Date:
March, 2014
File:
PDF, 2.57 MB
english, 2014