Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2005 Vol. 23; Iss. 3
Growth and characterization of plasma-assisted molecular beam epitaxial-grown AlGaN/GaN heterostructures on free-standing hydride vapor phase epitaxy GaN substrates
D. F. Storm, D. S. Katzer, J. A. Mittereder, S. C. Binari, B. V. Shanabrook, L. Zhou, D. J. Smith, X. Xu, D. Mcvey, R. P. Vaudo, G. R. BrandesVolume:
23
Year:
2005
Language:
english
DOI:
10.1116/1.1885013
File:
PDF, 491 KB
english, 2005