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Time dependent changes in extreme ultraviolet reflectivity of Ru mirrors from electron-induced surface chemistry
Kanjilal, A., Catalfano, M., Harilal, S. S., Hassanein, A., Rice, B.Volume:
111
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3691604
File:
PDF, 985 KB
english, 2012