Effect of deposition conditions on stability of sputtered...

Effect of deposition conditions on stability of sputtered oxide in MOS structures

Emil V. Jelenkovic, K.Y. Tong
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Volume:
37
Year:
1997
Language:
english
Pages:
11
DOI:
10.1016/0026-2714(95)00246-4
File:
PDF, 441 KB
english, 1997
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