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Reliability and yield in fabrication of microcantilever structures using bulk silicon micromachining
A. Rawicz, M. Parameswaran, J.M. ChenVolume:
36
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0026-2714(96)00036-4
File:
PDF, 333 KB
english, 1996