Copper interconnection lines: SARF characterization and...

Microelectronics Reliability 1996 Vol. 36; Iss. 11-12

Copper interconnection lines: SARF characterization and lifetime test

C. Ciofi, V. Dattilo, B. Neri
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Volume:
36
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0026-2714(96)00189-8
File:
PDF, 293 KB
english, 1996
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