Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 6
Deflection properties of an electrostatic electron lens with a shifted electrode
Christiaan Zonnevylle, Aernout, Verduin, Thomas, Hagen, Cornelis W., Kruit, PieterVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4826250
File:
PDF, 1.80 MB
english, 2013