Interactions of ion beams with surfaces. Reactions of...

The Journal of Chemical Physics 1978 Vol. 68; Iss. 4

Interactions of ion beams with surfaces. Reactions of nitrogen with silicon and its oxides

Taylor, J. Ashley, Lancaster, Gerald M., Ignatiev, A., Rabalais, J. Wayne
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Volume:
68
Year:
1978
Language:
english
Journal:
The Journal of Chemical Physics
DOI:
10.1063/1.435869
File:
PDF, 855 KB
english, 1978
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