Plasma enhanced chemical vapor deposition and characterization of boron nitride gate insulators on InP
Bath, A., van der Put, P. J., Becht, J. G. M., Schoonman, J., Lepley, B.Volume:
70
Year:
1991
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.349118
File:
PDF, 771 KB
english, 1991