![](/img/cover-not-exists.png)
Formation of cBN films by ion beam assisted deposition
Wada, TetsuyoshiVolume:
10
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578181
Date:
May, 1992
File:
PDF, 704 KB
english, 1992