Formation of cBN films by ion beam assisted deposition

Formation of cBN films by ion beam assisted deposition

Wada, Tetsuyoshi
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Volume:
10
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578181
Date:
May, 1992
File:
PDF, 704 KB
english, 1992
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