![](/img/cover-not-exists.png)
Selective plasma-induced deposition of fluorocarbon films on metal surfaces for actuation in microfluidics
P. Bayiati, A. Tserepi, E. Gogolides, K. MisiakosVolume:
22
Year:
2004
Language:
english
DOI:
10.1116/1.1764815
File:
PDF, 334 KB
english, 2004