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Low-temperature CVD of iron, cobalt, and nickel nitride thin films from bis[di(tert-butyl)amido]metal(II) precursors and ammonia
Cloud, Andrew N., Davis, Luke M., Girolami, Gregory S., Abelson, John R.Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4865903
Date:
March, 2014
File:
PDF, 1.02 MB
english, 2014