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Preparation of Large-Aperture Macroporous Silicon with Controllable Pore Tip Angle on Low-Resistivity p-Type c-Si Substrate by Metal-Catalyzed Electrochemical Etching
Li, Z., Zhao, L., Diao, H., Li, H., Zhou, C., Wang, W.Volume:
2
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.021304jss
Date:
February, 2013
File:
PDF, 575 KB
english, 2013