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Role of ammonia in depositing silicon nanoparticles by remote plasma enhanced chemical vapor deposition
Rodríguez, A., Arenas, J., Pérez-Martínez, A.L., Alonso, J.C.Volume:
125
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2014.03.144
Date:
June, 2014
File:
PDF, 1.07 MB
english, 2014