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A bulk-micromachined bistable relay with U-shaped thermal actuators
Jin Qiu,, Lang, J.H., Slocum, A.H., Weber, A.C.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2005.856676
Date:
October, 2005
File:
PDF, 814 KB
english, 2005