About the Influence of Double Bonds in the APPECVD of Acrylate-Like Precursors: A Mass Spectrometry Study of the Plasma Phase
Nisol, Bernard, Arnoult, Grégory, Bieber, Thomas, Kakaroglou, Alexandros, De Graeve, Iris, Van Assche, Guy, Terryn, Herman, Reniers, FrançoisVolume:
11
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201300176
Date:
April, 2014
File:
PDF, 1.02 MB
english, 2014