Development and Characterization of a CMOS-MEMS...

Journal of Microelectromechanical Systems 2013 / 12 Vol. 22; Iss. 6

Development and Characterization of a CMOS-MEMS Accelerometer With Differential LC-Tank Oscillators

Chiu, Yi, Hong, Hao-Chiao, Wu, Po-Chih
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Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2013.2282419
Date:
December, 2013
File:
PDF, 2.47 MB
english, 2013
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