[IEEE 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010) - Xiamen (2010.01.20-2010.01.23)] 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems - A MEMS electrostatic resonator for a fast-scan STM system
Hsin-Hung Liao,, Hsin-Hong Shen,, Bo-Ting Liao,, Yao-Joe Yang,, Yu-Chun Chen,, Woei-Wu Pai,Year:
2010
Language:
english
DOI:
10.1109/NEMS.2010.5592458
File:
PDF, 800 KB
english, 2010