Electrostatic pull-in instability in MEMS/NEMS: A review

Sensors and Actuators A: Physical 2014 / 08 Vol. 214

Electrostatic pull-in instability in MEMS/NEMS: A review

Zhang, Wen-Ming, Yan, Han, Peng, Zhi-Ke, Meng, Guang
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Volume:
214
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.04.025
Date:
August, 2014
File:
PDF, 2.49 MB
english, 2014
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