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An integrated Mach–Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition
Choo, Sung Joong, Kim, Jinsik, Lee, Kyung Woon, Lee, Dong Ho, Shin, Hyun-Joon, Park, Jung HoVolume:
14
Language:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2014.04.016
Date:
July, 2014
File:
PDF, 1.41 MB
english, 2014