Pattern shape effects and artefacts in deep silicon etching

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1999 Vol. 17; Iss. 4

Pattern shape effects and artefacts in deep silicon etching

Kiihamäki, J., Franssila, S.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581761
File:
PDF, 574 KB
english, 1999
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