[IEEE 2008 Digest of the IEEE/LEOS Summer Topical Meetings - Acapulco, Mexico (2008.07.21-2008.07.23)] 2008 Digest of the IEEE/LEOS Summer Topical Meetings - Design and fabrication of a MEMS thermal actuator for 3D optical switching applications
Varona, Jorge, Tecpoyotl-Torres, Margarita, Escobedo-Alatorre, Jesus, Hamoui, Anas A.Year:
2008
Language:
english
DOI:
10.1109/LEOSST.2008.4590474
File:
PDF, 1.00 MB
english, 2008