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Highly insulating, fully porous silicon substrates for high temperature micro-hotplates
Lucklum, Frieder, Schwaiger, Alexander, Jakoby, BernhardVolume:
213
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.04.004
Date:
July, 2014
File:
PDF, 1.66 MB
english, 2014