Ultrahigh barrier coating deposition on polycarbonate...

Ultrahigh barrier coating deposition on polycarbonate substrates

Schaepkens, Marc, Kim, Tae Won, Gün Erlat, Ahmet, Yan, Min, Flanagan, Kevin W., Heller, Christian M., McConnelee, Paul A.
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Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1705646
File:
PDF, 435 KB
english, 2004
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