Ultrahigh barrier coating deposition on polycarbonate substrates
Schaepkens, Marc, Kim, Tae Won, Gün Erlat, Ahmet, Yan, Min, Flanagan, Kevin W., Heller, Christian M., McConnelee, Paul A.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1705646
File:
PDF, 435 KB
english, 2004