Measurement of Thin Film Mechanical Properties Using...

MRS Bulletin 1992 / 07 Vol. 17; Iss. 7

Measurement of Thin Film Mechanical Properties Using Nanoindentation

Pharr, G.M., Oliver, W.C.
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Volume:
17
Language:
english
Journal:
MRS Bulletin
DOI:
10.1557/S0883769400041634
Date:
July, 1992
File:
PDF, 1.31 MB
english, 1992
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