Plasma-enhanced chemical vapor deposition synthesis of silica-silicone nanolaminates using a single precursor
Patel, Rakhi P., Wolden, Colin A.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3553149
File:
PDF, 486 KB
english, 2011