Identification and quantification of FOUP molecular...

Microelectronic Engineering 2013 / 5 Vol. 105

Identification and quantification of FOUP molecular contaminants inducing defects in integrated circuits manufacturing

Nguyen, Thi Quynh, Fontaine, Hervé, Borde, Yannick, Jacob, Véronique
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Volume:
105
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.04.008
Date:
May, 2013
File:
PDF, 923 KB
english, 2013
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