Temperature and doping dependencies of electrical properties in Al-doped 4H-SiC epitaxial layers
Koizumi, Atsushi, Suda, Jun, Kimoto, TsunenobuVolume:
106
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3158565
File:
PDF, 402 KB
english, 2009