A low-power resonant micromachined compass

Journal of Micromechanics and Microengineering 2004 / 04 Vol. 14; Iss. 4

A low-power resonant micromachined compass

Leïchlé, Thierry C, Arx, Martin Von, Reiman, Stephen, Zana, Iulica, Ye, Wenjing, Allen, Mark G
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Volume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/4/005
Date:
April, 2004
File:
PDF, 424 KB
english, 2004
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