Micromachined Piezoresistive Accelerometers Based on an...

Journal of Microelectromechanical Systems 2011 / 02 Vol. 20; Iss. 1

Micromachined Piezoresistive Accelerometers Based on an Asymmetrically Gapped Cantilever

Li, Yuefa, Zheng, Qinglong, Hu, Yating, Xu, Yong
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2010.2100024
Date:
February, 2011
File:
PDF, 856 KB
english, 2011
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