Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 1
Analysis of leakage current mechanisms in RuO[sub 2]–TiO[sub 2]–RuO[sub 2] MIM structures
Racko, J., Mikolášek, M., Harmatha, L., Breza, J., Hudec, B., Fröhlich, K., Aarik, J., Tarre, A., Granzner, R., Schwierz, F.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3534022
File:
PDF, 714 KB
english, 2011