Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1994 / 1 Vol. 12; Iss. 1
![](/img/cover-not-exists.png)
Atomic layer epitaxy deposition processes
Bedair, S. M.Volume:
12
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.587179
Date:
January, 1994
File:
PDF, 961 KB
english, 1994