A 0.13-$\mu$m CMOS Interface Circuit for a MEMS...

IEEE Transactions on Circuits and Systems I: Regular Papers 2013 / 12 Vol. 60; Iss. 12

A 0.13-$\mu$m CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System

Ali Taghvaei, M., Cicek, Paul-Vahe, Allidina, Karim, Nabki, Frederic, El-Gamal, Mourad N.
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Volume:
60
Language:
english
Journal:
IEEE Transactions on Circuits and Systems I: Regular Papers
DOI:
10.1109/TCSI.2013.2265976
Date:
December, 2013
File:
PDF, 1.42 MB
english, 2013
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