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Stresses arising from a solid state reaction between palladium films and Si(001) investigated by in situ combined x-ray diffraction and curvature measurements
Gergaud, P., Thomas, O., Chenevier, B.Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1590059
File:
PDF, 279 KB
english, 2003