[IEEE 2007 IEEE International Electron Devices Meeting - Washington, DC, USA (2007.12.10-2007.12.12)] 2007 IEEE International Electron Devices Meeting - Reducing Variation in Advanced Logic Technologies: Approaches to Process and Design for Manufacturability of Nanoscale CMOS
Kuhn, Kelin J.Year:
2007
Language:
english
DOI:
10.1109/IEDM.2007.4418976
File:
PDF, 4.15 MB
english, 2007