3D Integration Using Self-Assembly at Air-Water-Solid...

3D Integration Using Self-Assembly at Air-Water-Solid Interface

Park, Kwang Soon, Varel, Cagdas, Hoo, Ji Hao, Baskaran, Rajashree, Bohringer, Karl F.
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Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2013.2291235
Date:
June, 2014
File:
PDF, 1.06 MB
english, 2014
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