Heteroepitaxy of GaSb on Si(111) and fabrication of HfO2/GaSb metal-oxide-semiconductor capacitors
Ohtake, Akihiro, Mano, Takaaki, Miyata, Noriyuki, Mori, Takahiro, Yasuda, TetsujiVolume:
104
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4862542
Date:
January, 2014
File:
PDF, 1.07 MB
english, 2014