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Application of triton X-100 surfactant for silicon anisotropic etching in KOH-based solutions
Rola, Krzysztof P., Zubel, IrenaVolume:
31
Language:
english
Journal:
Materials Science-Poland
DOI:
10.2478/s13536-013-0130-8
Date:
October, 2013
File:
PDF, 1.95 MB
english, 2013