A spatially resolved retarding field energy analyzer design...

Review of Scientific Instruments 2014 / 04 Vol. 85; Iss. 4

A spatially resolved retarding field energy analyzer design suitable for uniformity analysis across the surface of a semiconductor wafer

Sharma, S., Gahan, D., Kechkar, S., Daniels, S., Hopkins, M. B.
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4870900
Date:
April, 2014
File:
PDF, 1.52 MB
english, 2014
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