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Molecular dynamics simulations of Ar[sup +] bombardment of Si with comparison to experiment
Humbird, David, Graves, David B., Stevens, A. A. E., Kessels, W. M. M.Volume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2787713
File:
PDF, 566 KB
english, 2007