Raman study of thin films of amorphous-to-microcrystalline...

Journal of Applied Physics 2003 Vol. 94; Iss. 5

Raman study of thin films of amorphous-to-microcrystalline silicon prepared by hot-wire chemical vapor deposition

D. Han, J. D. Lorentzen, J. Weinberg-wolf, L. E. Mcneil, Q. Wang
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Volume:
94
Year:
2003
Language:
english
DOI:
10.1063/1.1598298
File:
PDF, 258 KB
english, 2003
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